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ArticleName Development of design of the fluidized bed reactors for the trichlorosilane synthesis
ArticleAuthor Ivanov V. M., Trubitsyn Yu. V.

Classic Private University, Zaporozhye, Ukraine:

V. M. Ivanov, Post-graduate Student, e-mail:
Yu. V. Trubitsyn, Professor


This work is devoted to the design features of the PIC-reactors of synthesis of trichlorosilane, which is used in the production of polycrystalline silicon. Trichlorosilane is produced by the hydrochlorination of technical silicon and hydrogenation of silicon tetrachloride, formed during the polysilicon production as a byproduct. Modern technologies make it possible to apply the process of hydrogenation of silicon tetrachloride to trichlorosilane, which is recycled to the production of polysilicon. There are described the known designs of PIC-reactors developed for the synthesis of trichlorosilane. In the synthesis practice the reactors with gushing bed and suspended bed have found their application. The design features of the reactors hydrochlorination of silicon and hydrogenation of silicon tetrachloride are examined. Gushing bed reactors are equipped with conical bottom with the function of the gas distributing cone, cylindrical or conical shell and expander for separation of particles, carried away by the gas stream from the reaction zone. Reactors with the suspended bed have a cylindrical or conical shell with built-in gas-distributing grid. For pre-heating of silicon load and ensuring of optimum reaction temperature the reactors can be equipped with the heaters. For the purpose of removement of heat of exothermic reactions, the heat-exchange elements are foreseen in the reactors designs. The advantages and disadvantages of the reactors designs are present taking into account their design features and operating experience. There are given the proposals for usage of reactors with gushing bed and suspended bed. There was made the conclusion that the development and implementation of the suspended bed reactor is the most reasonable for the catalytic hydrogenation, which is nowadays considered as promissing.

keywords Trichlorosilane, silicon tetrachloride, hydrochlorination, hydrogenation, PIC-reactor, side-bar, gas-distribution grid, fluidization, gushing bed, suspended bed

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